TECHNOLOGY- Cleanroom @ UC




















    To fabricate and characterize BioMEMS components and structures, Siloam will access the Central Clean Room Complex of Electrical & Computer Engineering and Computer Science Department (4000 sq.ft) and the Center for Microelectronic Sensors and MEMS at the University of Cincinnati (new facility with approximately 8,000 sq.ft of clean room (with class 10 lithography facility)). The cleanroom facilities which are fully equipped with facilities to design, fabricate, and characterize micromachined structures and systems implemented on chips with integrated circuits for BioMEMS applications. UC BioMEMS clean room is equipped with plastic injection molding machine and hot embossing machine for plastic biochip modules and with all microfabrication equipments for UV-LIGA processing to fabricate disposable biochip cartridges.

    The Central Cleanroom Complex houses a mask making machine allowing for in-house fabrication of photolithography masks. UC BioMEMS clean room also provides a double-side mask aligner, anisotropic etching systems, wafer polishers, electroplating systems, sensor and actuator testing equipment, wafer bonding and packaging facilities, wafer aligner and bonder and surface, bulk, and LIGA-like micromachining processes.

    Full fabrication process for plastic biochip cartridges will be performed at the University of Cincinnati, based on the agreement between Siloam Biosciences and the University of Cincinnati, allowing Siloam¨s employees to access the facilities as already confirmed by the University of Cincinnati.
　
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